Growth of Carbon Nanotube by Thermal Chemical Vapor Deposition at Low Temperature with FeZrN Film

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概要

• 論文の詳細を見る

• Recently, the direct growth of carbon nanotubes on a glass substrate by thermal chemical vapor deposition (CVD) at low temperatures has been studied for the fabrication of field emission displays (FEDs). We achieved the synthesis of carbon nanotubes on soda lime glass at low temperatures (500–550°C) by a novel granulation method using FeZrN film. The FeZrN film is amorphia direct after sputtering, however, it changes into crystalloid to separate out Fe fine particles by thermal treatment. The characteristic was applied to successfully make the precursor of carbon nanotubes. The emission was also obtained and the turn-on electron field was approximately 3 V/μm.

• Japan Society of Applied Physicsの論文
• 2003-10-01

著者

• Sawada Takao

  Advanced Technology R&d Center Mitsubishi Electric Corporation

• Nakata Shuhei

  Advanced Technology R&d Center Mitsubishi Electric Corporation

• Hosono Akihiko

  Advanced Technology R&d Center Mitsubishi Electric Corp.

• Shiroishi Tetsuya

  Advanced Technology R&d Center Mitsubishi Electric Corporation

• Takai Mikio

  Graduate School of Engineering Science and Research Center for Materials Science at Extreme Conditions, Osaka University, Osaka 560-8531, Japan

• Kanazawa Yasunori

  Graduate School of Engineering Science and Research Center for Materials Science at Extreme Conditions, Osaka University, Osaka 560-8531, Japan

• Hosono Akihiko

  Advanced Technology R&D Center, Mitsubishi Electric Corporation, Amagasaki 664-8661, Japan

• Nakata Shuhei

  Advanced Technology R&D Center, Mitsubishi Electric Corporation, Amagasaki 664-8661, Japan

• Shiroishi Tetsuya

  Advanced Technology R&D Center, Mitsubishi Electric Corporation, Amagasaki 664-8661, Japan

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