Design and Fabrication of Large Scale Micro-LED Arrays and Silicon Driver for OEIC Devices
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概要
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In this paper, we designed and fabricated large scale micro-light-emitting-diode (LED) arrays and silicon driver for single chip device for realizing as prototypes of heterogeneous optoelectronic integrated circuits (OEICs). The large scale micro-LED arrays were separated by a dry etching method from mesa structure to 16,384 pixels of 128 × 128, each with a size of 15µm in radius. Silicon driver was designed the additional bonding pad on each driving transistor for bonding with micro-LED arrays. Fabricated micro-LED arrays and driver were flip-chip bonded using anisotropic conductive adhesive.
著者
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Wakahara Akihiro
Dept. Of Electronic And Information Engineering Toyohashi Univ. Of Technology
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Iijima Ko-ichiro
Dept. Of Electronic And Information Engineering Toyohashi Univ. Of Technology
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Shin Sang-baie
Dept. Of Electronic And Information Engineering Toyohashi Univ. Of Technology
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Iwayama Sho
Stanley Electric Co. Ltd.
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Okada Hiroshi
Electronics-inspired Interdisciplinary Research Institute Toyohashi Univ. Of Technology
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WAKAHARA Akihiro
Dept. of Electronic and Information Engineering, Toyohashi Univ. of Technology
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OKADA Hiroshi
Electronics-Inspired Interdisciplinary Research Institute, Toyohashi Univ. of Technology
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