Vertical-Objective-Based Ellipsometric Microscope for Real-Time Observation of nm-Thick Lubricant Films
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概要
- 論文の詳細を見る
The vertical-objective-based ellipsometric microscope (VEM) is expected to be a useful method for clarifying the lubrication phenomena that uses thin liquid lubricants, especially the lubricant for hard disk drives (HDDs). Although the feasibility of VEM for thin lubricant films was confirmed, the designs for the optical system and image detection have not been established. In this report, the optical design of the VEM is presented, as well as the method of controlling the coherent noises and improving the thickness resolution is discussed. By our method, the thickness resolution of VEM can be improved to 0.4 nm, and the real-time observation of sub-nm-thick thin liquid lubricant films can also be achieved.
著者
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Itoh Shintaro
Department of Micro Nano Systems Engineering, Nagoya University
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Zhang Hedong
Department Of Complex Systems Science Graduate School Of Information Science Nagoya University
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Kajihara Yosuke
Department Of Neurosurgery Shimane Prefecturel Central Hospital
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FUKUZAWA Kenji
Department of Micro-Nano Systems Engineering, Nagoya University
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FUKUZAWA Kenji
Department of Health Chemistry, Faculty of Pharmaceutical Sciences, Tokushima University
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Zhang Hedong
Department of Complex Systems Science, Nagoya University
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Qingqing Liu
Department of Micro-Nano Systems Engineering, Nagoya University
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Itoh Shintaro
Department of Micro-Nano Systems Engineering, Nagoya University
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Kajihara Yosuke
Department of Micro-Nano Systems Engineering, Nagoya University
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