SIM-09 MOLECULAR DYNAMICS SIMULATIONS OF UV PATTERNING OF MONOLAYER LIQUID LUBRICANT FILMS(Simulations of Micro/Nano Scale Phenomena III,Technical Program of Oral Presentations)
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概要
- 論文の詳細を見る
The effect of masked UV irradiation on distribution of monolayer polar lubricant films over solid surfaces was investigated by molecular dynamics simulations. Consistent with experimental results, the simulation results showed that masked UV irradiation induces a patterned surface structure with thicker lubricant in the irradiated area than in the non-irradiated area. Such structure was caused by the stretch of the lubricant molecules in the film thickness direction following the increase of molecule density in the irradiated area.
- 一般社団法人日本機械学会の論文
- 2009-06-17
著者
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Fukuzawa Kenji
Department Of Micro System Engineering School Of Engineering Nagoya University
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Fukuzawa Kenji
Department Of Micro-nano Systems Engineering Graduate School Of Engineering Nagoya University
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Zhang Hedong
Department Of Complex Systems Science Graduate School Of Information Science Nagoya University
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Itoh Shintaro
Department Of Micro-nano Systems Engineering Graduate School Of Engineering Nagoya University
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ZHANG Hedong
Dept. of Complex Systems Science, Nagoya University
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KOMATSU Shinji
Dept. of Complex Systems Science, Nagoya University
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FUKUZAWA Kenji
Dept. of Micro-Nano Systems Engineering, Nagoya University
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ITOH Shintaro
Dept. of Micro-Nano Systems Engineering, Nagoya University
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Komatsu Shinji
Dept. Of Complex Systems Science Nagoya University
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