HDI-28 DIRECT VISUALIZATION OF THIN FILM SPREADING OVER MAGNETIC DISK SURFACE BY LOW-COHERENCE PHASE-SHIFTING INTERFEROMETRY
スポンサーリンク
概要
- 論文の詳細を見る
Low-coherence phase-shifting interferometry is presented for direct visualization of thin film spreading over a magnetic disk surface. In this method, three-dimensional measurement is straightforwardly realized by introducing phase-shifting function to the interferometry, and image noise is remarkably suppressed by employing an incoherent white light source. The applicability of this method was demonstrated by experimental results.
- 一般社団法人日本機械学会の論文
著者
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Fukuzawa Kenji
Department of Micro Nano Systems Engineering, Nagoya University
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Zhang Hedong
Department of Micro Nano Systems Engineering, Nagoya University
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Fukuzawa Kenji
Department Of Micro System Engineering School Of Engineering Nagoya University
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Mitsuya Yasunaga
Department Of Micro Nano Systems Engineering Nagoya University
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Fukuzawa Kenji
Department Of Micro-nano Systems Engineering Graduate School Of Engineering Nagoya University
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Zhang Hedong
Department Of Complex Systems Science Graduate School Of Information Science Nagoya University
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ISHIDA Sakiko
Department of Micro System Engineering, School of Engineering, Nagoya University
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Ishida Sakiko
Department Of Micro System Engineering School Of Engineering Nagoya University
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Fukuzawa Kenji
Department Of Micro Nano System Engineering Graduate School Of Engineering Nagoya University
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FUKUZAWA Kenji
Department of Health Chemistry, Faculty of Pharmaceutical Sciences, Tokushima University
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MITSUYA Yasunaga
Department of Micro System Engineering, School of Engineering, Nagoya University
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