MNS-14 NANO-STRUCTURE-BASED PATTERNING OF NANOMETER THICK LUBRICANT FILMS(Micro/Nanosystem Science and Technology IV,Technical Program of Oral Presentations)
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概要
- 論文の詳細を見る
Nano-structure-based patterning of nanometer thick lubricant films is presented. Nanometer thick lubricant films can be patterned on the nanometer-scale using the oxide nano-structure fabricated by probe oxidation. We clarified that the lubricant distribution strongly depends on the shape of nano-structure.
- 2009-06-17
著者
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Fukuzawa Kenji
Department of Micro Nano Systems Engineering, Nagoya University
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Shikata Yusuke
Department of Micro Nano Systems Engineering, Nagoya University
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Imura Yuichi
Department of Micro Nano Systems Engineering, Nagoya University
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Itoh Shintaro
Department of Micro Nano Systems Engineering, Nagoya University
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Zhang Hedong
Department of Micro Nano Systems Engineering, Nagoya University
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Fukuzawa Kenji
Department Of Micro System Engineering School Of Engineering Nagoya University
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Fukuzawa Kenji
Department Of Micro-nano Systems Engineering Graduate School Of Engineering Nagoya University
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Imura Yuichi
Department Of Micro Nano Systems Engineering Nagoya University
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Zhang Hedong
Department Of Complex Systems Science Graduate School Of Information Science Nagoya University
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Itoh Shintaro
Department Of Micro-nano Systems Engineering Graduate School Of Engineering Nagoya University
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Shikata Yusuke
Department Of Micro Nano Systems Engineering Nagoya University
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Fukuzawa Kenji
Department Of Micro Nano System Engineering Graduate School Of Engineering Nagoya University
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FUKUZAWA Kenji
Department of Health Chemistry, Faculty of Pharmaceutical Sciences, Tokushima University
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