Fast Initiation and Mode Transition of Radio Frequency Induction Plasmas at Atmospheric Pressure Using Tungsten Pin Electrodes Array
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概要
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The effects of using an array of tungsten pin electrodes on the ignition dynamics of radio frequency (rf) discharges generated by inductively coupled plasma (ICP) technique at atmospheric pressure are investigated experimentally. The experimental observations reveal that the array of tungsten pin electrodes successfully enhance the initial discharges maintained by the strong electrostatic field with stable and fast ignition, which enables us to sustain efficient rf induction plasmas at atmospheric pressure range.
著者
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Ohno Noriyasu
EcoTopia Research Institute, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan
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TAKAMURA Shuichi
Department of Electrical and Electronics Engineering, Faculty of Engineering, Aichi Institute of Technology,Toyota 470-0392, Japan
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RAZZAK M.
Department of Electrical and Electronic Engineering, Faculty of Engineering, Aichi Institute of Technology, Toyota 470-0392, Japan
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TAKAMURA Shuichi
Department of Electrical and Electronic Engineering, Faculty of Engineering, Aichi Institute of Technology, Toyota 470-0392, Japan
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