Validity of Electron Temperature Measurement by Using Boltzmann Plot Method in Radio Frequency Inductive Discharge in the Atmospheric Pressure Range
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概要
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The validity of electron temperature measurement using the Boltzmann plot method was investigated in a radio frequency (rf) inductive discharge in the atmospheric pressure range. Since the Boltzmann plot method requires local thermal equilibrium (LTE), the parameter regions of electron temperature and electron density, in which the Boltzmann plot method is applicable, were analyzed in terms of a comparison of the spontaneous emission and collisional excitation to the excited states. It is observed that in our rf-inductive plasma near the atmospheric pressure range the Boltzmann plot method does not provide an exact measurement of electron temperature because of relatively low electron density, which does not satisfy the calculation criteria. An alternative method employing a combination of the Stark broadening measurement and the Saha-Boltzmann equation was demonstrated to more accurately determine the plasma parameters (electron temperature and electron density).
- 社団法人 プラズマ・核融合学会の論文
著者
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RAZZAK M.
Department of Energy Engineering and Science, Graduate School of Engineering, Nagoya University
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Ukai Hiroshi
Department Of Energy Engineering And Science Graduate School Of Engineering Nagoya University
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Ohno Noriyasu
EcoTopia Research Institute, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan
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Uesugi Yoshihiko
Department of Electrical and Electronic Engineering, Kanazawa University
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OHNO Noriyasu
EcoTopia Science Institute, Nagoya University
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TAKAMURA Shuichi
Department of Electrical and Electronics Engineering, Faculty of Engineering, Aichi Institute of Technology,Toyota 470-0392, Japan
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RAZZAK M.
Department of Electrical and Electronic Engineering, Faculty of Engineering, Aichi Institute of Technology, Toyota 470-0392, Japan
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TAKAMURA Shuichi
Department of Electrical and Electronic Engineering, Faculty of Engineering, Aichi Institute of Technology, Toyota 470-0392, Japan
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UESUGI Yoshihiko
Department of Electrical and Electronic Engineering, Graduate School of Natural Science, Kanazawa University
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