サーボモータに対するサンプル点間を考慮した最適ディジタル制御系設計

概要

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A continuous-time plant with discretized continuous-time controller do not yield stability if the sampling rate is lower than some certain level. Thus far, high functioning electronic control has made use of high cost hardwares which are needed to implement discretized continuous-time controllers, while low cost hardwares generally do not have high enough sampling rate. This technical note presents results comparing performance indices with and without intersample behavior, and some answer to the question how a low specification device can control a plant effectively. We consider a machine simulating wafer handling robots at semiconductor factories, which is an electromechanical system driven by a direct drive motor. We illustrate controller design for the robot with and without intersample behavior, and simulations and experimental results by using these controllers. Taking intersample behavior into account proves to be effective to make control performance better and enables it to choose relatively long sampling period. By controller design via performance index with intersample behavior, we can cope with situation where short enough sampling period may not be employed, and freedom of controller design might be widened especially on choice of sampling period.