油拡散ポンプとソープションポンプより成る超高真空系

概要

論文の詳細を見る
An ultrahigh vacuum system which is composed of a Hickman type oil diffusion pump, a sorption pump and a non- refrigerated isolation trap using molecular sieve 13x as active material was tested. This combination has advantages of protecting the evacuation system from dangers by electricity failure. suspension of water-supply and of avoiding the trouble for a steady supply of refrigerant. The results obtained are summarized as follows. 1) Amounts of air sorbed on molecular sieve 13x at 14°C and -183°C were about 2.5 l·μHg /g and 91446 l·μHg/g. respectively (at an apparent critical backing pressure=85μ) after bake -out at 400°C 26 for hours. 2) Maintaining time of ultimate pressure depends on the activity of molecular sieve When a sorption pump with new molecular sieve was operated the system could be kept at an ultimate pressure below 5×10-9 mmHg for about 4 days. but with fairly used up one it was below 7×10-9mmHg for about 2 days.
日本真空協会の論文