炭素による真空表面の改質とそのガス放出 (ガス放出を考える<特集>)

概要

論文の詳細を見る
Reduction of outgassing from a stainless steel surface modified by carbon was studied. Carbon was deposited by ECR (electron cyclotron resonance) plasma with a CH<SUB>4</SUB>/H<SUB>2</SUB> mixture gas. The ECR condition for a μ-wave of 2.45 GHz was obtained by permanent magnets. The outgassing rates before and after the deposition were measured using air as the test gas. The outgassing rates of residual gas species from the coated surface after an air exposure of 1 atm for 24 h typically showed a reduction of 1/3-1/5. Adsorption of water vapor on an amorphous carbon film at room temperature by low energy ion scattering was investigated in comparison with that on a stainless steel surface. It was found that water vapor adsorbed less on amorphous carbon than on stainless steel. Measurements of activation energies of the desorption of water vapor on stainless steel and carbon materials by TDS (thermal desorption spectroscopy) support the improvement of the outgassing property.
日本真空協会の論文