光学式6軸力センサの開発とその非線形校正

概要

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A new 6-axial force sensor using the optical measuring technique is proposed. The structure of the sensor is based on the unit which has a small light source being set face to face with a photo sensor of quarter-splitting type to measure their minute displacements in two directions each other. Three sets of the said unit are held by an elastic frame. The new sensor, in comparison with conventional strain-gauge-based device, is more compact, light in weight and low in cost. The amplifier can be integrated in the sensor itself. Compliance (approximately 100μm/full) is measured a little larger than conventional devices, but, the range can be decreased by further contrivance. The accuracy of the measurement was better than conventional devices by using newly introduced calibration method.<BR>Conventional calibration method for a 6-axial force sensor solely depended on a stiffness matrix induced under the state in which single force/moment was applied. In actual operation, however, non-linear interference occurs among plural force inputs. The newly introduced signal-processing technique has the features to make calibration under the generalized conditions. An experimental setup in which 6-axial force sensor could be simultaneously inputted with plural axial forces was produced and the proposed calibration method was demonstrated valid.
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