分割型光検出器を用いた3軸力センサ

概要

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A new type of force sensor composed of a split type photo sensor, a light source and their supporting elastic frame is proposed. The structure of the sensor is simple. The segmental photo sensors detect the small displacement of the light source caused by the apllied force with high sensitivity. The amplifiers for the photo sensor can be small and built-in. Because of these characteristics, the force sensor can be designed more compact and light-weight than conventional force sensor using strain gauges. Force detecting experiments are made for the force sensor consists of quadri-segmental photo sensor, LED light source and cylinderical elastic frame and it is shown that the three-axes force can be measured with the accuracy of 0.4% of standard deviation even when the forces are applied simultaneously.
一般社団法人日本ロボット学会の論文