CVD・SiC-Cナノ・コンポジットの合成と熱的性質

概要

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As a fundamental study for the preparation of CVD⋅SiC/C functionally gradient materials, SiC-C nano-composites were prepared by chemical vapor deposition using SiCl4-C3H8-H2 system. Thermal conductivity and thermal expansion of the composites were measured. Consistently with the results of thermodynamic calculation, SiC-C nano-composites from C to SiC were prepared by controlling Si/C ratio in input gas. Thermal properties of the composites were affected by the morphology of C phase. The thermal conductivity of the composites changed accompanying with the composition and micro-structure. In the composition range <5mol%SiC, deposits showed strong anisotropy in thermal expansion. However, the thermal expansion of CVD⋅SiC-C nano-composites having C content up to 73.5mol% nearly equal to that of CVD⋅SiC.
社団法人粉体粉末冶金協会の論文