ナノシート溝生成時の加工精度に及ぼすAFMプローブの影響 : —プローブ材種による摩擦エネルギの散逸性に基づくメカニズム—

概要

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To be attained a machining accuracy by Atomic Force Microscope (AFM) probe, it is necessary to make clear the machining mechanism by AFM probe material. Therefore, taking account of the new developed AFM probe materials, this paper proposes the groove generation processing model based on Fluctuation-dissipation theorem using friction force examined a groove machining on nano-sheets. The probability distribution estimated from the model allows us to provide that the correlation of the machining accuracy for groove width coarseness and the coefficients of friction between AFM probe and nano-sheets. Furthermore, the calculated dispersion from the probability distribution of the model is tended to be consistent with groove width coarseness evaluating machined groove.