ナノシートのAFMプローブによる機械的微細除去加工(第3報) : 溝生成時のエネルギ散逸を考慮した最適走査速度の解析

概要

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To be attained a high precision groove machining of nano-sheets with Atomic Force Microscope(AFM), it is necessary to make clear the groove machining mechanism by analytical method. This paper proposes the theoretical formula which takes aim at the groove generation energy of groove machining on nano-sheets. Construction of this formula thinks of stochastic process because edge chippings of a machined groove is suggested brittle mode machining. Besides, the groove generation energy of unit edge length is corresponded to groove width. Accordingly, the existing probabilistic of machined groove width is assumed Boltzmann distribution. The edge chipping generation probability calculated from this formula is tended to be consistent with the evaluation value of groove machined. Furthermore, optimal machining condition of scanning speed is estimated to be around 70〜140nm/s.
2009-03-05