3-1 積層型薄膜熱電モジュールの作製と性能評価(OS3 電池レス・デバイスのためのエネルギーハーベストの展開)

概要

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We fabricated a multi-layered in-plane thermoelectric modules using bismuth telluride (Bi_2Te_3) as a power supply for electric micro-devices, and evaluated those performances. The thermoelectric semiconductor can convert thermal energy into electricity directly without any moving parts. In this study, we made a multi-layered in-plane thermoelectric module with thin film insulator and thermoelectric thin films. Bi_2Te_3 thin films were deposited on a SiN_x thin film by a flash evaporation method through shadow masks. The output voltages and powers of the fabricated modules were measured while simply heating the bottom of the modules. The output power is increased due to the decreased electrical resistance of the proposed multi-layered thermoelectric module.
一般社団法人日本機械学会の論文
2011-09-25