熱電マイクロジェネレータの作製と評価(熱工学,内燃機関,動力など)

概要

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In this paper, we fabricated a Bi_2Te_3 thermoelectric micro-generator, and evaluated those performances. Bi_2Te_3 is one of popular thermoelectric materials with the highest thermoelectric properties at room temperature. The patterned thin film of Bi_2Te_3 was deposited on a free-standing Si_3N_4, thin film by using a flash evaporation method through shadow masks which were made by standard micro-fabrication processes. In the design of the micro-generators, we got the output voltages of the micro-generators by numerically calculating the temperature distribution of the freestanding thin film using ANSYS CFX. The calculated output voltages agreed well with experimental results. The output voltages of the fabricated micro-generators were measured while simply heating the bottom of the micro-device, and the maximum output voltage was 48mV at a 13K temperature difference.
社団法人日本機械学会の論文
2008-12-25