220404 遊離砥粒研磨に有用な交流電場印加により誘起する粒動形成機構(OS16 東京ブロック・山梨ブロック共同企画機械工学が支援する微細加工技術(半導体・MEMS・NEMS)2(研磨プロセス),オーガナイズド・セッション)

概要

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The generating mechanism of micro scale local countercurrent flows and movements of dielectric particles in insulating fluid is investigated with a particle image analyzing and a particle tracking method. These flows and movements of particles are induced under an alternating electric field between parallel electrodes. And these particles movement generate some valuable flow structures. These flow structures are formed under high-electric-field intensity and low-frequency conditions, and are generated after the electric field inversion. This phenomenon has enormous advantages for a free abrasive polishing and a nanoscale green processing. In this study, the generating conditions of the electric field are classified and the generating process is revealed. As a result, it is important to generate the flow and the movement of particles that dispersed particles concentrate near both electrodes before the electric field inversion under high-electric-field intensity and low-frequency conditions.
一般社団法人日本機械学会の論文
2011-03-17