21104 微細加工のための電場誘起されるナノダイヤモンド分散流体の流動特性(微細計測技術,OS.3 機械工学が支援する微細加工技術(半導体,MEMS,NEMS))

概要

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A new nanoscale processing technique using nano-diamond dispersion liquid controlled with an alternating electric field is proposed. This technique applied the active micro scale jet flow induced by an electric field has great advantages for a manufacturing technology and a bio-nano technology. In this study, the generating electric field conditions of the active electric field induced flow are classified with a microscope observation and the fundamental characteristics of the flow around the electrode are investigated with a micro PIV method to verify the ability of the processing for a manufacturing. The successive circulation flows is induced with alternating electric field near the edge point of the electrode. Furthermore, the threshold conditions of the electric field to generate the electric field induced flow are investigated.
一般社団法人日本機械学会の論文
2009-03-05