20105 マイクロ研磨加工に応用可能な粒子分散型機能性流体の流動特性 : 電極間距離の影響(機械工学が支援するマイクロ流体技術,OS1 機械工学が支援する微細加工技術(半導体・MEMS・NEMS))

概要

論文の詳細を見る
Flow characteristics of diamond particle dispersion type functional fluid impressed high AC voltage were investigated to improve a new polishing technique for nano-microscopic processing technology. This study evaluated the influence of electrode distance on flow characteristics. This functional fluid has some types of flow structure in microscopic flow field. One is the flow going and returning between the electrodes under the low electric intensity and the high AC frequency conditions. The other is the forced convection under the high electric intensity and the low frequency conditions. This forced convection is consisted of some rotational flow structures changing alternately the positive and the negative vorticity concentrations generated at the fixed time after impression of rectangular AC wave. These flow characteristics do not depend on the electrode distance but on the electric field conditions.
社団法人日本機械学会の論文
2006-03-09