2A2-A05 Electron Emission Induced Multi-Materialized Nanowires Growth

概要

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Due to nanoelectronic and mechanical system (NEMS) and bio-chemical applications, single material nanowire is not enough. The multi-materialized nanowires with couple type have been fabricated to improve applied field requirements. This paper presets the electron emission induced multi-materialized nanowires growth. An AFM cantilever was used for electrodes of the device and etched by FIB. Two carbon nanotubes (CNT) were assembled to the separated electrodes of AFM cantilever. A tungsten probe is etched by focused ion beam (FIB) into 300 nm in diameter and 25.4 [im in length. Then the probe is coated by parylene and cut the tip to open the tungsten. A tungsten nanowire is used for work electrode and a platinum nanowire is used for counter electrode. The nanowires were fabricated via field emission method by introducing hexacabonyl tungsten and trimethyl cyclopentadienyl platinum individually inside a field emission electron microscope.