S0403-1-1 新規MgSiO_3圧電薄膜の創製および生体適合評価([S0403-1]セラミックスおよびセラミックス系複合材(1))

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PbTiO3 and Pb(Zr,Ti)O3 have been applied to various actuators and sensors in micro-machine due to their high piezoelectric and dielectric properties. However, lead-based materials are prohibited to use by Restriction of Hazardous Substances regulation. Therefore, lead-free piezoelectric material has been widely studied to use for Bio-MEMS device. In this study, we try to generate a new MgSiO_3 thin film on Au(111)/SrTiO_3(110) substrate by using radio-frequency magnetron sputtering system. Crystallographic orientation was measured by using X-ray diffractometer and piezoelectric property of thin film was measured by the ferroelectric measurement system. Additionally, we examined biocompatibility of MgSiO_3 thin film by cytotoxicity test. As a result, MgSiO_3(111) thin film shows d_<33>=295.4pm/V and it had no toxic.
一般社団法人日本機械学会の論文
2010-09-04