1108 ディフューザ型バルブレスマイクロポンプの寸法効果(2)(OS11-2 ナノ・マイクロフルイディクス(マイクロポンプ・センサー),OS11 ナノ・マイクロフルイディクス,オーガナイズドセッション)

概要

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The effect of channel size on the characteristics of valve-less micro-pump with diffuser shaped element was investigated. The micro-pump consists of a diffuser shaped micro-channel and a chamber with a diaphragm, the vibration of which produces on oscillating flow. The pump performance of the diffuser type valve-less micro-pump with the cross sectional dimensions of 250μm×250μm was compared with previous data on 1mm×1mm micro-pump. The micro-channel was fabricated using micro fabrication technics. The measured maximum pump head and volumetric flow rate were 13.1mmAq at zero flow rate, and 0.2ml/min at zero pump head, respectively for the driving frequency 120Hz, and diaphragm deflection of 5μm. The pump head for micro-pump of 250μm is greater than micro-pump of 1mm.
一般社団法人日本機械学会の論文
2007-11-17