P2-29 Basic Study on Fabrication Technology of MEMS Transducer(Poster session 2)
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概要
- 論文の詳細を見る
- 超音波エレクトロニクスの基礎と応用に関するシンポジウム運営委員会の論文
- 2006-11-15
著者
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Koh Keishin
Kanagawa Institute of Technology
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Hohkawa Kohji
Kanagawa Institute of Technology
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Koh Keishin
Kanagawa Institute Of Technolgy
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Sakata Kouji
Fuji Electric Systems
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Yokota Manabu
Kanagawa Inst. Technol.
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Yokota Manabu
Kanagawa Institute Of Technology
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Yamasaki Takanori
Kanagawa Institute of Technology
関連論文
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- Fabrication of Surface Acoustic Wave-Semiconductor Coupled Devices Using Epitaxial Lift-Off Technology
- P2-29 Basic Study on Fabrication Technology of MEMS Transducer(Poster session 2)
- P2-39 Surface Acoustic Wave devices on AlGaN/GaN heterostructure(Poster session 2)
- P2-6 Acoustic Wave Device Using GaN film with n+ Conduction Layer(Short oral presentation for posters)
- P2-5 Study on Layer Mode Device on GaN/Al_2O_3(Short oral presentation for posters)
- P3-32 Integration technology of two-dimensional ultrasonic transducers(Poster session 3)
- Basic Study to Develop Biosensors Using Surface Acoustic Waves
- Temperature Dependence of Surface Acoustic Wave Characteristics of GaN Layers on Sapphire Substrates