Basic Study to Develop Biosensors Using Surface Acoustic Waves
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概要
- 論文の詳細を見る
In this paper, we present a study of the bonding between piezoelectric substrates and semiconductor materials. We have studied [O. S. Wolfbesis: Fiber Optic Chemical Sensors and Biosensors, 1st ed. (CRC Press, Boca Raton, 1991) p. 21.] the surface state (hydrophilic) of GaAs, LiNbO3 and quartz substrates after different treatments methods [R. Hughes, A. Ricco, M. Butler and S. Martin: Science 254 (1991) 74.], the effects of migration of water molecules out of bonding surfaces induced by microwave and laser radiation. When Pb(Mg1/3Nb2/3)O3-PbTiO3 (PMN-PT) is used as a piezoelectric material, we have evaluated if PMN-PT can be made practically available for a new surface acoustic wave (SAW) biosensor detecting protein. The experimental results clarified that improvements in the bonding process are effective in obtaining a stronger bonding interface between the piezoelectric substrate and semiconductor materials. The frequency filtering of the central frequency of the PMN-PT substrate is also superior to that of the LiTaO3 substrate, but the result was not completely satisfactory. However, the electromechanical coupling coefficient of the PMN-PT substrate is excellent, therefore it will be used as a SAW sensor, in the near future, provided that new interdigital transducer (IDT) design will also be available to increase the frequency of filtering.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2005-04-15
著者
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Hohkawa Kohji
Kanagawa Institute of Technology
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CHONG Woo-Suk
Division of Bionics and Bioinformatics, College of Engineering, Chonbuk National University
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Kim Gi-beum
Division Of Bionics And Bioinformatics College Of Engineering Chonbuk National University
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Hong Chul-un
Division Of Bionics And Bioinformatics College Of Engineering Chonbuk National University
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Kim Nam-gyun
Division Of Bionics And Bioinformatics College Of Engineering Chonbuk National University
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Kwon Tae-kyu
Division Of Bionics And Bioinformatics College Of Engineering Chonbuk National University
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Chong Woo-Suk
Division of Bionics and Bioinformatics, College of Engineering, Chonbuk National University, Chonju 561-756, Korea
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Kwon Tae-Kyu
Division of Bionics and Bioinformatics, College of Engineering, Chonbuk National University, Chonju 561-756, Korea
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Hong Chul-Un
Division of Bionics and Bioinformatics, College of Engineering, Chonbuk National University, Chonju 561-756, Korea
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Kim Nam-Gyun
Division of Bionics and Bioinformatics, College of Engineering, Chonbuk National University, Chonju 561-756, Korea
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Hohkawa Kohji
Kanagawa Institute of Technology, High-Technology Research Center, 1030 Shimo-Ogino, Atsugi, Kanagawa 243-0292, Japan
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Kim Gi-Beum
Division of Bionics and Bioinformatics, College of Engineering, Chonbuk National University, Chonju 561-756, Korea
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