Derivation of dynamical equations of coupled MEMS gyroscopes (非線形問題)

概要

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Vibratory gyroscopes are utilized to detect angles of rotation or rates of angular rotation. A typical gyroscope includes drive mode and sense mode which allows the measurement of rotational force, known as the Coriolis force, applied orthogonally to the plane of motion. In the presence of this force, the gyroscope produces a change in acceleration in drive mode which in turn causes motion in sense mode. This motion can be converted into angular rate and the input force can be estimated. Such angular rate sensors can be coupled to enhance their sensitivities by allowing them to act as a system of sensors. To help understand the dynamics underlying such coupled system, prototype devices have been fabricated in open ended coupling scheme in PolyMUMPs process. In this research, coupled dynamics of these particular devices are targeted. Furthermore, the global behavior of the coupled system will be numerically investigated in various regimes where the devices can be operated.
社団法人電子情報通信学会の論文
2009-03-03