A222 平板に電位差を与えた場合の熱・電輸送のボルツマン輸送方程式による数値解析(マイクロ・ナノスケール7)

概要

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In micro-fabricated electric device, non-equilibrium state might be appeared in metal and/or semiconductor that compose the device. In such a situation, the device performance estimation by the macroscopic transport equations that assume quasi-equilibrium distribution is difficult. Against the background of this difficulty, we are developing a numerical simulation based on Boltzmann transfer equation (BTE), which can analyze thermal and electric phenomena even when the state is far from equilibrium. In this paper, we show the BTE formulation and its application to the electric field problem in metallic plate. As numerical calculation result, we obtained the maximum of electric charge density at both boundary and the shifted-distribution function, which agree with physical intuition.
一般社団法人日本機械学会の論文
2006-11-23