3410 硬質薄膜のフェムト秒レーザープロセシングとトライボロジー特性の制御(S16-3 皮膜の磨耗および残留応力特性(1),S16 コーティング材料の皮膜特性とその評価)

概要

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We report tribological properties of diamond-like carbon (DLC) film of which surface has been nanostructured with femtosecond (fs) laser pulses. For this study, the fs-laser processing technology has been developed to produce a uniformly nanostuctured DLC surface over a wide area of 15×15mm^2. The results have demonstrated that the DLC surface has an excellent frictional performance by coating a MoS_2 layer on the nanostructured surface, where the friction coefficient of DLC surface was observed to decrease down to 0.07 from 0.18 for the steel ball and to 0.02-0.04 from 0.08 for the WC-Co ball used in the friction test machine. Furthermore, we have developed the method for the radical deterioration of the tribological property by means of the net-shaped cross scanning of the fs-laser pulses.
社団法人日本機械学会の論文
2006-09-15