MP-46 フェムト秒レーザーによりナノ構造が形成されたDLCおよびGCの摩擦特性(ポスターセッション)

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This paper reports macro and micro frictional properties of DLC, TiN, CrN films and GC substrate of which surfaces are nanostructured with femtosecond (fs) laser pulses. The friction coefficient μ of the nanostructured surface was measured with a ball-on disc friction test machine at a usual load, and with a micro-scratch test at an ultralight load of 1.5mN utilizing a diamond tip. The results have shown that carbon materials of DLC and GC provide lower values of μ than TiN and CrN. At an ultralight load, μ of nanostructured surfaces of thin films monotonously increases with an increase in laser pulse energy. On the other hand, the friction coefficient of GC substrate irradiated at a low fluence around the ablation threshold has shown a lower value than that of the non-irradiated surface.
2011-09-25