Modelling of Temperature and Flow Fields of RF Induction Plasma (I) : Preliminary Calculation for Low Temperature and High Flow Rate Case(Physics, Process, Instrument & Measurement)

概要

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A preliminary mathematical formulation has been developed to represent the velocity field and the temperature field in inductively produced RF plasma at atmospheric pressure, which is weakly ionized in high rate of gas flow. The formulation utilized an engineering approach in which the plasma was regarded as a continuum of known electrical properties. The behavior was represented by using the MHD equations and the convective heat balance relationship including the concept of turbulent nature of flow. The calculations were carried out by specifying the torch and coil geometry and the coil current, and then governing equations were solved numerically. The frequency of coil current was fixed at 13.56MHz. Ultimately the velocity profiles and the temperature profiles within the system under the various conditions. Some combinations of gas flow rate, coil current and coil position were selceted as the parametric condition of calculation. The theoretical prediction of temperature field and flowing behavior of plasma gas are compared and discussed with experimental results.
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