Plasma Sintering of New Carbide Electrodes(Physics, Processes, Instruments & Measurements)

概要

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In order to develop electrodes that can withstand use in arc plasmas involving reactive gases such as Cl_2 and O_2, TaC and HfC have been sintered by plasma. The sintered carbides exhibited excellent performances as electrodes for arc plasmas involving the reactive gases. The sintering plasma was generated in an Ar atmosphere from 40kPa to 53kPa by an rf power operating at 13.56MHz. High-density TaC with a relative density of about 93% was produced with a sintering time of 3.6ks when the rf output power was 5kW and the atmospheric pressure was 53kPa. No significant densification of HfC, however, was observed after the sintering under the same conditions. Addition of 30% Hf powder accelerated greatly the densification of the HfC powder, resulting in the attainment of relative density of about 89% under the same sintering conditions. The sintered TaC and HfC with 30% Hf were applied for the cathodes of atmospheric arcs involving Cl_2 and O_2, respectively. Both of these carbide electrodes showed excellent arc stability and durability compared with the conventional electrodes.
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