CVD TiN被膜の摩耗特性と摩耗形態の関係 : SEM・VTRトライボシステムによる摩耗特性の評価(機械要素,潤滑,工作,生産管理など)

概要

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In order to evaluate the wear properties of CVD TiN coatings, its wear process was observed in-situ during sliding against a diamond pin in a SEM VTR Tribosystem. Wear depth and a cross-sectional area of the wear grooves were also measured using this system after in-situ observation, and specific wear amount was calculated. When coating delamination occurs, specific wear amount increases with the number of friction cycles. On the other hand, without coating delamination, specific wear amount decreases with increasing number of friction cycles. The relationship between micro-scopic wear properties and wear modes was investigated. The order of the specific wear amount for each wear mode was obtained as follows: specific wear amount w_s<1×10^<-5>mm^3/Nm for ploughing, 1×10^<-5>mm^3/Nm<w_s<1×10^<-3>mm^3/Nm for powder formation, 1×10^<-4>mm^3/Nm<w_s<1×10^<-3>mm^3/Nm for flake formation and 1×10^<-3>mm^3/Nm<w_s for coating delamination. From these relationships, it was concluded that the observation of wear modes with a SEM VTR Trybosystem can be used to evaluate wear properties.
一般社団法人日本機械学会の論文
1997-06-25