CVD TiN被膜の微視的摩耗機構(機械要素,潤滑,工作,生産管理など)

概要

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In order to clarify the microscopic wear mechanism of CVD TiN coatings, the wear process was observed in-situ during sliding in a SEM tribosystem. Four wear modes were observed for CVD TiN coatings with the thickness of 1.6 μm: ploughing, powder formation, flake formation and coating delamination. On the other hand, only two wear modes were observed for CVD TiN coatings with the thicknesses of 7.5 μm and 12 μm: powder formation and flake formation. Wear modes varied from ploughing to powder formation and coating delamination to flake formation for CVD TiN coatings with the thickness of 1.6 μm with increasing number of friction cycles. The number of transition friction cycles of the wear mode decreased with the increase of load. It was considered that powder formation occurred due to the chipping of the asperity tips on the surface, and that flake formation occurred due to the surface cracks which were generated by large tensile stress at the tail region of the contact area.
一般社団法人日本機械学会の論文
1997-04-25