超精密5軸制御加工におけるセッティング誤差の一般化補正法

概要

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The study deals with developing a new method to compensate the initial position error of diamond cutting tool in ultraprecision micromachining by use of a 5-axis control ultraprecision machining center. In the ultraprecision machining, various kinds of errors have large influence on the machining accuracy although they are very small. In recent years, the demand is increasing to fabricate complicated microparts accurately and efficiently by means of multi-axis control ultraprecision machining center. However, the accumulation of various kinds of errors due to the increasing number of motion axes and the setting difficulty of small diamond tools deteriorate the form accuracy of machined microparts. To solve these problems, the study proposes a new method to precisely measure the tool radius and to correctly set the tool, and develops the initial tool setting error compensation system. From experimental results, it is found that the method proposed in the study is effective.
公益社団法人精密工学会の論文
2007-10-05