Growth of High-Quality Epitaxial InN Film with High-Speed Reactant Gas by Organometallic Vapor-Phase Epitaxy : Structure and Mechanical and Thermal Properties of Condensed Matter
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概要
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The effects of reactant-gas velocity on the growth of InN on GaN/sapphire substrate by organometallic vapor-phase epitaxy (OMVPE) were studied. With a high-speed reactant gas, the thickness of the stagnant layer is reduced so that the reactant species can reach the surface effectively. A layerlike growth of InN was achieved, resulting in a marked improvement of the film quality. In addition, significant enhancement of the growth rate up to 2 μm/h was obtained. The full-width at half maximum (FWHM) of the X-ray rocking curve (XRC) decreased with increasing gas velocity. A 476 arcsec width of XRC was reproducibly achieved, indicating high-quality InN epitaxial films. A Hall mobility of 250cm^2/V-s with a carrier concentration of 1×10^<19>cm<-3> at room temperature was obtained on a 0.5-μm-thick InN film.
- 社団法人応用物理学会の論文
- 2002-11-15
著者
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CHEN Kuei-Hsien
Institute of Atomic and Molecular Sciences, Academia Sinica
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Yang Ying-jay
Institute Of Electrical Engineering National Taiwan University
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Yang Fu-hsiang
Institute Of Electrical Engineering National Taiwan University
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HWANG Jih-Sheng
Institute of Atomic and Molecular Sciences, Academia Sinica
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WANG Jih-Hsiang
Optoelectronics and Systems Laboratories, Industrial Technology Research Institute
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Chen Kuei-hsien
Institute Of Atomic And Molecular Sciences Academia Sinica
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Hwang Jih-sheng
Institute Of Atomic And Molecular Sciences Academia Sinica
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Wang Jih-hsiang
Optoelectronics And Systems Laboratories Industrial Technology Research Institute
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Yang Ying-Jay
Institute of Electrical Engineering, National Taiwan University
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