Properties of Diamond-Like Carbon FilmsFabricated by the Filtered Cathodic Vacuum Arc Method
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2002-09-15
著者
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Sasaki Shinji
Storage Technology Research Center Research & Development Group Hitachi Ltd.
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Sasaki Shinji
Production Engineering Research Laboratory Hitachi Ltd.
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Inaba Hiroshi
Production Engineering Research Laboratory Hitachi Ltd.
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Inaba Hiroshi
Storage Technology Research Center Research & Development Group Hitachi Ltd.
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Inaba Hiroshi
Department Of Information Sciences Tokyo Denki University
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Hirano Shinya
Production Engineering Research Laboratory Hitachi Ltd.
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Hirano Shinya
Production Engineering Research Laboratory Hitachi Ltd
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Furusawa K
Storage Technology Research Center Research & Development Group Hitachi Ltd.
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Furusawa Kenji
Production Engineering Research Laboratory Hitachi Ltd.
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FUJIMAKI Shigehiko
Data Storage Systems Division, Hitachi, Ltd.
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TODOROKI Satoru
Production Engineering Research Laboratory, Hitachi, Ltd.
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YAMASAKA Minoru
Production Engineering Research Laboratory, Hitachi, Ltd.
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SHI Xu
Nanofilm Technologies International Pte., Ltd.
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Shi Xu
Nanofilm Technologies International Pte. Ltd.
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Fujimaki Shigehiko
Data Storage Systems Division Hitachi Ltd.
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Todoroki S
Production Engineering Research Laboratory Hitachi Ltd.
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Yamasaka Minoru
Production Engineering Research Laboratory Hitachi Ltd.
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