Size-tunable Ge Nano-particle Arrays Patterned on Si Substrates with Nanosphere Lithography and Thermal Annealing

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 2002-07-15

著者

• Li Nan

  Department Of Physic And Astronomy University Of Western Ontario

• Li Nan

  Department Of Mechatronics And Precision Engineering Tohoku University

• ZINKE-ALLMANG Martin

  Department of Physic and Astronomy, University of Western Ontario

• Li Nan

  Department Of Analytical Chemistry Dalian University Of Technology

• Zinke-allmang Martin

  Department Of Physic And Astronomy University Of Western Ontario

関連論文

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• Low Energy Electron Stimulated Etching of Thin Si Oxide Layer Using STM : Nano-fabrication with A Localized Low-energy e-Beam
• STM Nano-Lithography with SiO_2 Mask
• Low Energy Electron Beam Stimulated Surface Reaction: Selective Etching of SiO_2/Si Using Scanning Tunneling Microscope
• Size-tunable Ge Nano-particle Arrays Patterned on Si Substrates with Nanosphere Lithography and Thermal Annealing
• ACTIVE TACTILE SENSING USING A TWO-FINGER SYSTEM
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• Ordering of Germanium Clusters During Epitaxy on Patterned Silicon Substrates

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