2300 磁気ヘッドスライダの極低浮上化技術(キーノートスピーチ,情報機器コンピュータメカニクス2)

概要

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We developed a novel slider design that has less flying height sensitivity to altitude and manufacturing tolerances for application to head-disk interfaces of sub 10nm flying height. This design also predicts less off-track vibration in case of slider-disk contacts and it has been confirmed experimentally. We applied "pivot shift" concept to our slider design in order to reduce the flying height loss due to altitude. In this design, the pivot point of the slider is shifted forward toward the leading edge from the usual center position of the slider. This shift increases the pitch moment, which can compensate for flying height loss due to increase in altitude. We also applied "super shallow step" of a few nanometers in depth to our slider design in order to trim the trailing edge rail width of the slider. The trimmed rail can reduce the flying height loss due to manufacturing tolerances and can also reduce the off-track vibration due to slider-disk contacts. By combining the pivot shift concept with the super shallow step design, the flying height of the slider can be reduced to sub 10nm successfully while maintaining needed clearance to ensure the mechanical reliability of the head-disk interface.
社団法人日本機械学会の論文
2005-03-21