結像形変位計の開発 : 第1報, 非点収差式一軸変位計

概要

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A new optical probe based on an astigmatism method is developed as an evaluation tool for measuring the dynamic behavior of mechatronic devices and parts. The sensor is sensitive when probing in the direction of the optical axis. The optical system has special features in the layout. In addition, the optical system in combination with a planeconvex type condenser lens contributes to reduced aberrations, the combination has two functions, 1) making a collimation beam and 2)condensing the reflected beam to the photodetector. Therefore, the sensing head could be made into a compact size(83×25×32mm^3). In signal processing, an APC(Automatic Power Control) circuit is used for stabilizing the output signal and compensating for the reflection of the objects. This system has a useful operating panel, where alignment of the sensor's optical axis precisely to the object surfaces is simple. The performance of this sensor features high sensitivity(37mV/μm), a long working distance (WD=50mm), and high frequency characteristics (f>20kHz). The toughness against various circumstances in bad conditions is also evaluated.
社団法人日本機械学会の論文
1991-04-25