High-Speed Measurement of Large Area Micro-Structured Surfaces(Nano/micro measurement and intelligent instrument)
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概要
- 論文の詳細を見る
This paper presents a measurement system based on an AFM to measure large area micro-structured surfaces rapidly, which consists of a compact and precision AFM probe-unit, a linear stage and a spindle. The sample is mounted on the spindle and the AFM probe-unit is mounted on the linear stage. In this measurement system, the sample is measured rapidly in a spiral scanning pattern which is made by rotating the spindle and moving the linear stage in radial direction. Design of the measurement system, results of investigating the linear stage and the spindle performances are described. Profile measurement results of a micro-structured surface is also presented.
- 一般社団法人日本機械学会の論文
- 2005-10-18
著者
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Gao Wei
Department Of Cardiology Peking University Third Hospital And Key Laboratory Of Molecular Cardiovasc
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Gao Wei
Department Of Nanomechanics Tohoku University
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Kiyono Satoshi
Department Of Nanomechanics Tohoku University
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Kiyono Satoshi
Department Of Mechanical Engineering Tohoku University
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Aoki Jun
Department Of Diagnostic Radiology Gunma University School Of Medicine
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Aoki Jun
Department Of Nanomechanics Tohoku University
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Aoki Jun
Department Of Diagnostic Radiology Gunma University Hospital
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Gao Wei
Department Of Cardiology Peking University Third Hospital
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Aoki Jun
Department of Diagnostic and Interventional Radiology, Gunma University School of Medicine
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