Design and construction of a two-degree-of-freedom linear encoder for nanometric measurement of stage position and straightness

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概要

• 論文の詳細を見る
• 2010-01-01

著者

• Gao Wei

  Department Of Cardiology Peking University Third Hospital And Key Laboratory Of Molecular Cardiovasc

• Gao Wei

  Department Of Nanomechanics Tohoku University

• Arai Yoshikazu

  Department Of Chemistry School Of Science And Engineering Waseda University

• KIMURA Akihide

  Department of Nanomechanics, Tohoku University

• ZENG Lijiang

  Department of Precision Instruments, Tsinghua University

• Kimura Akihide

  Department Of Nanomechanics Tohoku University

• Arai Yoshikazu

  Department Of Nanomechanics Tohoku University

• Zeng Lijiang

  Department Of Precision Instruments Tsinghua University

• Gao Wei

  Department Of Cardiology Peking University Third Hospital

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