Design and construct of a long-stroke fast-tool-servo equipped with a force sensor(Nano/micro measurement and intelligent instrument)
スポンサーリンク
概要
- 論文の詳細を見る
This paper describes a PZT-based fast-tool-servo (FTS) for ultra-precision diamond turning. A pre-loaded ring-type PZT with a maximum stroke of 70μm is employed to actuate the diamond tool attached on the free end of the PZT. The displacement of the PZT is servo controlled by a PID controller based on the measurement result of a capacitance-type displacement sensor integrated inside the PZT actuator. A piezoelectric-type force sensor is coaxially connected on the other end of the PZT for detection of machining force. Investigation of static and dynamic responses of the FTS, calibration of the force sensor output are carried out.
- 一般社団法人日本機械学会の論文
- 2005-10-18
著者
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Gao Wei
Department Of Nanomechanics Tohoku University
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TANO Makoto
Department of Nanomechanics, Tohoku University
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SANUKI Toshinobu
Nanosystems Engineering Lab, Department of Nanomechanics, Tohoku University
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TANO Makoto
Nanosystems Engineering Lab, Department of Nanomechanics, Tohoku University
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GAO Wei
Nanosystems Engineering Lab, Department of Nanomechanics, Tohoku University
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KIYONO Satoshi
Nanosystems Engineering Lab, Department of Nanomechanics, Tohoku University
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Tano Makoto
Department Of Nanomechanics Tohoku University
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Sanuki Toshinobu
Nanosystems Engineering Lab Department Of Nanomechanics Tohoku University
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KIYONO Satoshi
Department of Nanomechanics, Tohoku University
関連論文
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