A New Method for Phase Readout in Phase Modulated Interferometer
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概要
- 論文の詳細を見る
A simple time-counting phase readout method for a sawtooth phase modulated interferometer is proposed. In this method, the measured phase is estimated from time intervals between zero points of only one modulated interference signal. A compact differential interferometer using a laser diode as the light source is described. The interferometer is calibrated with a capacitance-type displacement sensor by exploiting the advantages of a lever system, and some experimental results are presented.
- 一般社団法人日本機械学会の論文
- 1996-09-15
著者
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Kiyono Satoshi
Department Of Mechanical Engineering Tohoku University
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Kiyono Satoshi
Department Of Mechatronics Faculty Of Engineering Tohoku University
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Nishino Yoichi
Department Of Mechatronics Faculty Of Engineering Tohoku University
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Nishino Yoichi
Department Of Crystalline Materials Science Faculty Of Engineering Nagoya University
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Ge Zongtao
Department of Mechatronics, Faculty of Engineering, Tohoku University
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Ge Zongtao
Department Of Mechatronics Faculty Of Engineering Tohoku University
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Ge Zongtao
Department Of Mechatronics And Precision Engineering Faculty Of Engineering Tohoku University
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