A Real Time Monitoring System for Laser Microprocessing(量子光学,非線形光学,超高速現象,レーザ基礎,及び一般)

元データ 2006-05-26 社団法人電子情報通信学会

概要

A monitoring system for laser microprocessing has been designed and constructed based on the view point that the characteristics of laser processing inherently relates to the characteristics of laser plasma. The system integrates 5 monitoring functions including optical and electromagnetic methods. It was found that induced current is very useful as an unique monitoring method for laser processing. This induced current method has many potential applications in laser microprocessing such as for estimation of the ablated amount, observation of layer removal, detection of the moment at when laser beam penetrates the sample, and also for determination of precise tight focusing position of the lens, in real time.

著者

Idris Nasrullah Department Of Physics Faculty Of Mathematic And Natural Sciences Syiah Kuala University
Kagawa Kiichiro Department of Physics, Faculty of Education and Regional Studies, University of Fukui
Kagawa Kiichiro Department Of Fiber Amenity Engineering Graduate School Of Engineering Fukui University
Idris Nasrullah Department Of Fiber Amenity Engineering Graduate School Of Engineering Fukui University
KOBAYASI Takao Department of Physics, Faculty of Education and Regional Studies, Fukui University
Kobayasi Takao Department Of Physics Faculty Of Education And Regional Studies Fukui University

関連論文

▼もっと見る