A Real Time Monitoring System for Laser Microprocessing(量子光学,非線形光学,超高速現象,レーザ基礎,及び一般)

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概要

• 論文の詳細を見る

• A monitoring system for laser microprocessing has been designed and constructed based on the view point that the characteristics of laser processing inherently relates to the characteristics of laser plasma. The system integrates 5 monitoring functions including optical and electromagnetic methods. It was found that induced current is very useful as an unique monitoring method for laser processing. This induced current method has many potential applications in laser microprocessing such as for estimation of the ablated amount, observation of layer removal, detection of the moment at when laser beam penetrates the sample, and also for determination of precise tight focusing position of the lens, in real time.

• 社団法人電子情報通信学会の論文
• 2006-05-26

著者

• Idris Nasrullah

  Department Of Physics Faculty Of Mathematic And Natural Sciences Syiah Kuala University

• Kagawa Kiichiro

  Department of Physics, Faculty of Education and Regional Studies, University of Fukui

• Kagawa Kiichiro

  Department Of Fiber Amenity Engineering Graduate School Of Engineering Fukui University

• Idris Nasrullah

  Department Of Fiber Amenity Engineering Graduate School Of Engineering Fukui University

• KOBAYASI Takao

  Department of Physics, Faculty of Education and Regional Studies, Fukui University

• Kobayasi Takao

  Department Of Physics Faculty Of Education And Regional Studies Fukui University

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