電子サイクロトロン共鳴 (ECR) 励起シート状プラズマ源

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キーワードプラズマ : 電子サイクロトロン共鳴 (ECR) シート状処理物アルゴンガス PETフイルム濡れ性　抄録 : The sheet-shaped plasma of 450 mm in width was generated by an electron cyclotron resonance (ECR) excitation. A 2.45 GHz microwave (MW) radiates from a slot antenna with a size of 10×400 mm^2 to a vacuum chamber. Permanent magnets are arranged around the slot antenna to generate the ECR magnetic field strength of 875 gauss. The spatial distributions of an optical emission power of argon (Ar) plasmas were measured as a function of a gas pressure and a microwave power. The spatial distribution of an electric field strength of the MW was also measured using a dipole antenna. A poly (ethylene terephthalate) (PET) film was irradiated by the Ar plasma and the surface wettability of the PET film was examined.
鶴岡工業高等専門学校の論文
2003-12-25