Deposition of AlN Thin Films with Cubic Crystal Structures on Silicon Substrates at Room Temperature
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2000-05-01
著者
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Lu Yong-feng
Laser Microprocessing Laboratory Department Of Electrical Engineering And Data Storage Institute Nat
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Lu Y‐f
National Univ. Singapore Singapore
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Chong T‐c
Data Storage Inst. Singapore Sgp
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Lu Yong-feng
Laser Microprocessing Lab. Department Of Electrical Engineering And Data Strong Institute National U
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REN Zhong-Min
Laser Microprocessing Laboratory, Department of Electrical Engineering and Data Storage Institute, N
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CHONG Tow-Chong
Laser Microprocessing Laboratory, Department of Electrical Engineering and Date Storage Institute, N
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GOH Yeow-Whatt
Laser Microprocessing Laboratory, Department of Electrical Engineering and Data Storage Institute, N
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NG Mei-Ling
Data Storage Institute
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WANG Jian-Ping
Data Storage Institute
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CHEONG Boon-Aik
Data Storage Institute
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LIEW Yun-Fook
Data Storage Institute
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Goh Yeow-whatt
Laser Microprocessing Laboratory Department Of Electrical Engineering And Data Storage Institute Nat
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Chong Tow-chong
Laser Microprocessing Laboratory Department Of Electrical Engineering And Date Storage Institute Nat
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Wang Jian-ping
Laser Microprocessing Laboratory Department Of Electrical Engineering And Data Storage Institute Nat
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Ren Z‐m
National Univ. Singapore Singapore
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Ren Zhong-min
Laser Microprocessing Laboratory Department Of Electrical Engineering And Data Storage Institute Nat
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Chong Tow-chong
Laser Microprocessing Laboratory Department Of Electrical Engineering And Data Storage Institute Nat
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