Laser Cleaning of IC Mould and Its Real-Time Monitoring
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2000-08-15
著者
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Lu Yong-feng
Laser Microprocessing Laboratory Department Of Electrical Engineering And Data Storage Institute Nat
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Lu Y‐f
National Univ. Singapore Singapore
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Song Wen-dong
Laser Microprocessing Laboratory Department Of Electrical Engineering And Data Storage Institute Nat
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Chong T‐c
Data Storage Inst. Singapore Sgp
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Song Wen-dong
Laser Microprocessing Laboratory Department Of Electrical Engineering And Date Storage Institute Nat
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Lu Yong-feng
Laser Microprocessing Lab. Department Of Electrical Engineering And Data Strong Institute National U
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REN Zhong-Min
Laser Microprocessing Laboratory, Department of Electrical Engineering and Data Storage Institute, N
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HONG Ming-Hui
Laser Microprocessing Laboratory, Department of Electrical Engineering and Date Storage Institute, N
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CHEN Qiong
Advanced Systems Automation Limited
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CHONG Tow-Chong
Laser Microprocessing Laboratory, Department of Electrical Engineering and Date Storage Institute, N
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Chong Tow-chong
Laser Microprocessing Laboratory Department Of Electrical Engineering And Date Storage Institute Nat
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Ren Z‐m
National Univ. Singapore Singapore
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Ren Zhong-min
Laser Microprocessing Laboratory Department Of Electrical Engineering And Data Storage Institute Nat
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Hong Ming-hui
Laser Microprocessing Laboratory Department Of Electrical Engineering And Date Storage Institute Nat
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Chong Tow-chong
Laser Microprocessing Laboratory Department Of Electrical Engineering And Data Storage Institute Nat
関連論文
- Laser-Induced Removal of Fingerprints from Glass and Quartz Surfaces
- Wavelength Effects in the Laser Cleaning Process
- Laser Surface Cleaning in Air: Mechanisms and Applications
- Growth of Ultrathin Silver Films by Excimer-Laser-Induced Decomposition of Silver Acetate in Air
- Excimer-Laser Removal of SiO_2 Patterns from GaAs Substrates
- A Theoretical Model for Laser Cleaning of Microparticles in a Thin Liquid Layer
- A Cleaning Model for Removal of Particles due to Laser-Induced Thermal Expansion of Substrate Surface
- Pulsed Laser Deposition of TiNi Thin Films at Various Temperatures : Optics and quantum Electronics
- Laser Cleaning of IC Mould and Its Real-Time Monitoring
- Deposition of AlN Thin Films with Cubic Crystal Structures on Silicon Substrates at Room Temperature
- Removing Spherical Silica Particles from Si, Ge and NiP Substrates by KrF Excimer Laser
- Nano-scale Morphology and Crystallography of Laser-Deposited TiN Thin Films
- Optical Emission Spectrum Analyses during Pulsed Laser Deflash of Integrated Circuit Packages
- Characteristics of Excimer Laser Induced Plasma from an Aluminum Target by Spectroscopic Study
- Simulation for Thermal Processing of Amorphous Carbon Nitride
- Electromagnetic Calculations of the Near Field of a Tip under Polarized Laser Irradiation
- Scanning Tunneling Microscopy and Atomic Force Microscopy Studies of Laser Irradiation of Amorphous WO_3 Thin Films
- Electrochemical Nanolithography on Amorphous WO_3 Thin Films Using Scanning Thnneling Microscope in Air : Surfaces, Interfaces, and Films
- Nanostructure Formation on Amorphous WO_3 Thin Films in Air by Scanning Tunneling Microscopy
- Laser-Scanning Probe Microscope Based Nanoprocessing of Electronics Materials
- Studies of Pulsed Laser Deposition Mechanism of WO3 Thin Films
- Ab Initio Pseudopotential Calculations of Electronic Structure of Off-Stoichiometric ZnO
- Plastic Ball Grid Array Reflow Using a Fast-Modulated CW Laser
- Pulsed Laser Deposition of TiNi Thin Films at Various Temperatures
- Laser-Scanning Probe Microscope Based Nanoprocessing of Electronics Materials