Nano-scale Morphology and Crystallography of Laser-Deposited TiN Thin Films
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2000-11-15
著者
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Lu Yong-feng
Laser Microprocessing Laboratory Department Of Electrical Engineering And Data Storage Institute Nat
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Wang Hai-dan
Laser Microprocessing Laboratory Department Of Electrical Engineering And Data Storage Institute Nat
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Lu Yong-feng
Laser Microprocessing Lab. Department Of Electrical Engineering And Data Strong Institute National U
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REN Zhong-Min
Laser Microprocessing Laboratory, Department of Electrical Engineering and Data Storage Institute, N
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Ren Zhong-min
Laser Microprocessing Laboratory Department Of Electrical Engineering And Data Storage Institute Nat
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MAI Zhi-Hong
Laser Microprocessing Laboratory, Department of Electrical Engineering and Data Storage Institute, N
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Mai Zhi-hong
Laser Microprocessing Laboratory Department Of Electrical Engineering And Data Storage Institute Nat
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Mai Zhi-hong
Laser Microprocessing Laboratory Department Of Electrical Engineering And Data Storage Institute Nat
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