A Cleaning Model for Removal of Particles due to Laser-Induced Thermal Expansion of Substrate Surface
スポンサーリンク
概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1997-10-01
著者
-
Lu Yong-feng
Laser Microprocessing Laboratory Department Of Electrical Engineering And Data Storage Institute Nat
-
Lu Yong-feng
Department Of Electrical Engineering National University Of Singapore
-
Lu Y‐f
National Univ. Singapore Singapore
-
Song W‐d
National Univ. Singapore Singapore
-
SONG Wen-Dong
Department of Electrical Engineering and Data Storage Institute, National University of Singapore
-
YE Kai-Dong
Department of Electrical Engineering and Data Storage Institute, National University of Singapore
-
LEE Yuan-Ping
Department of Electrical Engineering and Data Storage Institute, National University of Singapore
-
CHAN Daniel
Department of Electrical Engineering and Data Storage Institute, National University of Singapore
-
LOW Tech-Seng
Department of Electrical Engineering and Data Storage Institute, National University of Singapore
-
Lee Yuan-ping
Department Of Electrical Engineering And Data Storage Institute National University Of Singapore
-
Ye Kai-dong
Department Of Electrical Engineering And Data Storage Institute National University Of Singapore
-
Chan D
National Univ. Singapore Singapore
-
Low Tech-seng
Department Of Electrical Engineering And Data Storage Institute National University Of Singapore
関連論文
- Laser-Induced Removal of Fingerprints from Glass and Quartz Surfaces
- Wavelength Effects in the Laser Cleaning Process
- Laser Surface Cleaning in Air: Mechanisms and Applications
- Growth of Ultrathin Silver Films by Excimer-Laser-Induced Decomposition of Silver Acetate in Air
- Excimer-Laser Removal of SiO_2 Patterns from GaAs Substrates
- A Theoretical Model for Laser Cleaning of Microparticles in a Thin Liquid Layer
- A Cleaning Model for Removal of Particles due to Laser-Induced Thermal Expansion of Substrate Surface
- Pulsed Laser Deposition of TiNi Thin Films at Various Temperatures : Optics and quantum Electronics
- Laser Cleaning of IC Mould and Its Real-Time Monitoring
- Deposition of AlN Thin Films with Cubic Crystal Structures on Silicon Substrates at Room Temperature
- Acoustic Emission in Laser Surface Cleaning for Real-Time Monitoring
- Temperature Rise and Heat Flux Induced by Laser Beam with Double-Gaussian Intensity Distribution
- Laser-Induced Dry Cleaning in Air : A New Surface Cleaning Technology in Lieu of Carbon Fluorochloride (CFC) Solvents
- Laser-Induced Dry Lift-off Process
- Removing Spherical Silica Particles from Si, Ge and NiP Substrates by KrF Excimer Laser
- Nano-scale Morphology and Crystallography of Laser-Deposited TiN Thin Films
- Optical Emission Spectrum Analyses during Pulsed Laser Deflash of Integrated Circuit Packages
- Characteristics of Excimer Laser Induced Plasma from an Aluminum Target by Spectroscopic Study
- Simulation for Thermal Processing of Amorphous Carbon Nitride
- Electromagnetic Calculations of the Near Field of a Tip under Polarized Laser Irradiation
- Scanning Tunneling Microscopy and Atomic Force Microscopy Studies of Laser Irradiation of Amorphous WO_3 Thin Films
- Electrochemical Nanolithography on Amorphous WO_3 Thin Films Using Scanning Thnneling Microscope in Air : Surfaces, Interfaces, and Films
- Nanostructure Formation on Amorphous WO_3 Thin Films in Air by Scanning Tunneling Microscopy
- A sensitive and specific liquid chromatography-tandem mass spectrometric method for determination of belinostat in plasma from liver cancer patients